ULVAC Oil Diffusion Vacuum Pump ULK-014A
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Manufacturer: ULVAC

ULVAC Oil Diffusion Vacuum Pump ULK-014A

SKU: 230487901010
$13,330.00

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Price Match

ULVAC Oil Diffusion Vacuum Pump ULK Series 

(Please note: This item has a 10 week Lead Time)

ULVAC’s diffusion pumps ULK Series have been developed not only for superior performance, but also for extremely low operating cost.

 

Features 

  • Shorter pump body height Loose flange system adopted (Except the outlet port flange for ULK-04A and 06A)
  • Loose flange system allows specification and installation of an arbitrary size flange, like ISO, ANSI, IMSI, etc. (Except the outlet port flange for ULK-04A and 06A)
  • Easy to clean due to simple disassembly of the pump
  • Check mechanism prevents the working fluid from flowing to the fore pump side.
  • Stable operation at the 10–2 Pa level
  • High critical backing pressure (see below list)

 

 

 


Model
Items
ULK-04A ULK-06A ULK-10A ULK-14A
Dimensions A (mm) 175 1200 3400 5400
B (mm) 150 180
240
240
C (mm) 341 449 650 670
Inlet Diameter Flange Correspond to
VG100
Correspond to
VG150
Correspond to
VG250
Correspond to
VG350
Outside diameter (mm) 185 235 350 450
Bolt holes No. - dia.
a. 8-dia. 12 a. 8-dia. 12 12-dia. 15 12-dia. 15
P.C.D (mm) 160 210 320 420
Gasket groove diameter
(Inside diameter x Width
120 x 4 x 3 175 x 4 x 3 275 x 7.5 x 4.2 380 x 7.5 x 4.2
Gasket groove diameter
(Inside diameter x Width x Depth)
120 x 4 x 4 175 x 4 x 4 275 x 8 x 8 380 x 8 x 8
Outside Diameter Flange Corresponds to
VG25
Corresponds to
VG40
Corresponds to
VG80
Corresponds to
VG80
Outside diameter (mm) 90 105 160 160
Bolt holes No. - dia.
4-dia. 10 4-dia. 10 4-dia. 10 4-dia. 10
P.C.D (mm) 70 85 135 135
Gasket groove diameter
(Inside diameter x Width
40 x 5 x 3 55 x 5 x 3 100 x 5 x 2.8 100 x 5 x 2.8
Gasket groove diameter
(Inside diameter x Width x Depth)RC 3/8 (PT 3/8)
V-40 V-55 V-100 V-100
Cooling water connection

RC 1/4 

(PT 1/4)

RC 1/4

(PT 1/4

RC 3/8

(PT 3/8)

RC 3/8

(PT 3/8)

Materials Pump body Stainless steel
Nozzle Aluminum
Cooling method Water cooling pipe
Oil level gauge None None Optional Attached
Weight (kg) 7.5 13.5 47 56
Shipping measurement
(height x Width)
550 x 330 x 400 580 x 420 x 580 730 x 550 x 700 750 x 550 x 700
Shipping Weight 10.5 17.5 54 64

 

 

Model Items ULK-04A ULK-06A ULK-10A ULK-14A
Pumping speed L/s 550 500 1200 1100 3400 3000 5400 4900
Working fluid ULVOIL D-11 D-31 D-11 D-31 D-11 D-31 D-11 D-31
Ultimate pressure Pa <2.6 x 10 -5 <2.6 x 10 –6 <2.6 x 10 -5 <2.6 x 10 –6 <2.6 x 10 -5 <2.6 x 10 -6 <2.6 x 10 -5 <2.6 x 10 -6
Torr <2.0 x 10–7 <2.0 x 10–8 <2.0 x 10–7 <2.0 x 10–8 <2.0 x 10–7 <2.0 x 10–8 <2.0 x 10–7 <2.0 x 10–8
mbar <2.6 x 10–7 <2.6 x 10–8 <2.6 x 10–7 <2.6 x 10–8 <2.6 x 10–7 <2.6 x 10–8 <2.6 x 10–7 <2.6 x 10–8
Critical backing (foreline) pressure Pa 4.0 x 101 6.0 x 101 4.0 x 101 6.0 x 101 3.5 x 101 4.0 x 101 3.1 x 101 4.0 x 101
Torr 3.0 x 10 -1 4.5 x 10 -1 3.0 x 10 -1 4.5 x 10 -1 2.6 x 10 -1 3.0 x 10 -1 2.3 x 10 -1 3.0 x 10 -1
mbar 4.0 x 10 -1 6.0 x 10 -1 4.0 x 10 -1 6.0 x 10 -1 3.5 x 10 -1 4.0 x 10 -1 3.1 x 10 -1 4.0 x 10 -1
Maximum throughput Pa•m3/s 8.6 x 10 -2 1.3 x 10 -1 1.5 x 10 -1 2.0 x 10 -1 3.5 x 10 -1 4.3 x 10 -1 3.5 x 10 -1 4.7 x 10 -1
Torr•L/s 1.2 x 10 -2 1.7 x 10 -2 2.0 x 10 -2 2.7 x 10 -2 4.7 x 10 -2 5.7 x 10 -2 4.7 x 10 -2 6.3 x 10 -2
mbar•L/s 8.6 x 10 -3 1.3 x 10 -2 1.5 x 10 -2 2 x 10 -2 3.5 x 10 -2 4.3 x 10 -2 3.5 x 10 -2 4.7 x 10 -2
Warm up time min 9 8.5 16.5 15 20 20 24 25
Power required *1 kW 0.55 0.73 0.9 1.2 2 2.4 2.25 3.15
Fluid capacity L 0.15 0.15 0.35 0.35 0.8 0.8 1.5 1.5
Cooling water consumption *2 L/min 1 1 1 1.5 2.5 3 2.5 3.5
Recommended fore pump VD151/VD201
PVD-180/PVD-360
VD301/VD401/VD601 PKS-016/PKS-030
VD901/VS1501
PKS-030VS150